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Erbium Doped Si/Sige Waveguide Diodes: Optical and Electrical Characterization

Neufeld E.,Luigart A.,Sticht A.,Brunner K.,Abstreiter G.

MRS proceedings/Materials Research Society symposia proceedings（1998）

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Abstract
We have fabricated erbium- and oxygen-doped Si/SiGe waveguide diodes showing the characteristic 1.54 More
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