Embedded planar source/drain stressors for a finFET including a plurality of finsJosephine B Chang,Paul Chang,Michael A Guillorn,Jeffrey W Sleightmag(2015)引用 23|浏览45暂无评分AI 理解论文溯源树样例生成溯源树,研究论文发展脉络Chat Paper正在生成论文摘要