Corrosion-resistant Mg/SiC Multilayer Coatings for EUV Laser Sources in the 25-80Nm Wavelength Region

Mg/SiC multilayer coatings with Al-Mg corrosion barrier layers and with high reflectance in up to three narrow wavelength bands within the 25-80 nm wavelength region have been developed for EUV laser source applications. The physics of the spontaneous intermixing and amorphization of the Al-Mg corrosion barriers for Mg/SiC multilayers are currently being investigated in detail. Initial results from studies of the long-term reflectance properties of corrosionresistant Mg/SiC multlayers are also discussed.