Mirror Electron Microscopy for Inspection of Flat Surfaces

We have developed a mirror electron microscope (MEM) for inspecting fine processed flat surfaces. This apparatus can detect nanometer-sized particles and scratches on very flat surfaces. Its sensitivity for electric charge distribution is useful for detecting failures in microdevice patterns. In observation of an insulator surface with the MEM, complex features caused by small amount of charge distribution were observed in the images. We believe that the MEM can provide different methods for characterization of electrical behavior on insulator surfaces.