Fluoropolymer interlayer dielectric by chemical vapor deposition Michael Mocella,Andrew E Feiring,Theodore A Treat,Yakov Brichko,Eugene S Lopata, Peter Rosemag(2005)引用 22|浏览17暂无评分AI 理解论文溯源树样例生成溯源树,研究论文发展脉络Chat Paper正在生成论文摘要