SOI technology for front end applications

Z Shaked,P Hurwitz, Alexey Heiman,Kurt A Moen,R Kanawati,Shehzad Ashraf Chaudhry,Marco Racanelli

2015 IEEE International Conference on Microwaves, Communications, Antennas and Electronic Systems (COMCAS)（2015）

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摘要

SOI processes have become the mainstream technology for wireless front end manufacturing following recent optimization of starting materials and fabrication processes. In this paper, we will describe such RFSOI platform for RF switches, the process optimizations and the devices offering required for efficient FEM design.

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关键词

SOI,RF switch,front end modules

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