Nanometer-scale ablation using focused, coherent extreme ultraviolet/soft x-ray lightC S Menoni,J J Rocca, G Vaschenko,Scott H Bloom,Erik H Anderson,Weilun Chao,Oscar Hembergmag（2011）引用 28|浏览4暂无评分关键词extreme ultraviolet,fresnel zone plateAI 理解论文溯源树样例生成溯源树，研究论文发展脉络Chat Paper正在生成论文摘要
