Dynamical Topography Measurements of Mems Up to 25 Mhz, Through Transparent Window, and in Liquid by Digital Holographic Microscope (Dhm)
10TH INTERNATIONAL CONFERENCE ON VIBRATION MEASUREMENTS BY LASER AND NONCONTACT TECHNIQUES - AIVELA 2012（2012）
关键词
DHM,MEMS,in-plane,out-of-plane,Cantilever,gyroscope,CMUT
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