Nanoscale Composition Imaging By Extreme Ultraviolet Laser Ablation Mass Spectrometry

Ilya Kuznetsov,Jorge Filevich,Feng Dong,Mark Woolston,Weilun Chao,Erik H Anderson,E R Bernstein,Dean C Crick,J J Rocca,C S Menoni

2015 CONFERENCE ON LASERS AND ELECTRO-OPTICS (CLEO)（2015）

引用 23|浏览7

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摘要

The first nano-scale 3-dimensional composition imaging is demonstrated. EUV laser ablation enables composition maps with 75 nm lateral, 20 nm depth resolution, and 0.01 amol sensitivity. 3D composition images of a single micro-organism were obtained.

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关键词

imaging,mass spectroscopy,spatial resolution

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