Semiconductor device including ruthenium electrode and method for fabricating the same Jinhyock Kim,Jaesung Roh,Seungjin Yeom, Keejeung Lee,Hansang Song,Deoksin Kil,Youngdae Kimmag(2012)引用 23|浏览18暂无评分AI 理解论文溯源树样例生成溯源树,研究论文发展脉络Chat Paper正在生成论文摘要