Monolithic Fabry-Perot Structure For Soft X-Rays

Felix E. Fernandez, C. Riedel, A. Smith, B. Edwards,B. Lai,F. Cerrina, Martin J. Carr, A. D. Romig, Jr.,J. Corno, L. Nevot,B. Pardo, J. M. Slaughter,Charles M. Falco

X-Ray Multilayers in Diffractometers, Monochromators, and SpectrometersSPIE Proceedings（1988）

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reflectivity,radiation,sputter deposition,absorption,silicon,molybdenum,reflection,synchrotron radiation,fabrication

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