Split-Gate Flash Mlc With Self-Limiting Programming

James Yingbo Jia,D Lee, Yuehhsin Chen, Chiensheng Su,Bomy Chen,S W Wang, Chunghuan Shieh, A Huang, Y Chu, Jensheng Yang,Derek Lin,Yungtao Lin,Chung Wang

2008 INTERNATIONAL SYMPOSIUM ON VLSI TECHNOLOGY, SYSTEMS AND APPLICATIONS (VLSI-TSA), PROCEEDINGS OF TECHNICAL PROGRAM（2008）

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摘要

In this paper, self-limiting programming was demonstrated on spilt-gate SuperFlash cells with CG gate. MLC programming was proposed with predetermined CG voltage for each level. A wafer-level calibration was proposed to correct die-to-die variation and allow fast programming.

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关键词

calibration,silicon,product design,voltage,computer aided manufacturing

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