4.05 - Atomic Layer DepositionMarkku Leskela,Jaakko Niinisto,Mikko Ritalamag(2014)引用 25|浏览11暂无评分关键词nanotechnology,atomic layer deposition,thin filmsAI 理解论文溯源树样例生成溯源树,研究论文发展脉络Chat Paper正在生成论文摘要