Polarization Management Techniques For Enhanced Vertical And Lateral Transport In Iii-Nitride Superlattices

GALLIUM NITRIDE MATERIALS AND DEVICES(2006)

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摘要
We report on a technique for optimizing transport properties in p- and n-type AlGaN/GaN and GaN/InGaN superlattices. As we show highly conductive heterostructures can be obtained by inserting a graded doped layer, which reduces the barrier height while maintaining high sheet carrier density. For optimized p-type AlGaN/GaN SL, an eight fold reduction of the barrier height and a 1.5 times increase in sheet hole density is obtained compared to typical SL. The optimized structure yields 13 orders of magnitude improvement in vertical conductivity (sigma(V)) compared to typical SL, and 35 times improvement in lateral conductivity (sigma(L)) compared to bulk p-GaN. For optimized p-type GaN/InGaN SL, an improvement of more than 10 orders of magnitude in sigma(V) compared to typical SL is obtained with sigma(L) better than that of bulk p-InGaN. We also investigate n-type SLs as current spreading layers. A significant improvement in current distribution is obtained for the optimized SLs.
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graded doped superlattices,enhanced vertical transport
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