Hydrogen Content and the Optical Bandgap in Amorphous Silicon
MRS Online Proceedings Library(2011)
摘要
The dependence of the optical bandgap on the hydrogen concentration is measured for amorphous silicon films prepared under different glow-discharge conditions. A deviation from the usually accepted linear dependence is found for hydrogen concentrations above 12 at.‰ We find that in this concentration region an increase of hydrogen incorporated as SiH2 is responsible for this behaviour.
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关键词
silicon,optical bandgap,hydrogen
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