Manufacturability Of 850nm Data Communication Vcsels In High Volume

Terry E. Sale,Chen Chu, Jeong-Ki Hwang, Gim-Hong Koh, Rashit Nabiev, Jason L-C Tan, Laura M. Giovane,M. V. Ramana Murty

VERTICAL-CAVITY SURFACE-EMITTING LASERS XIV(2010)

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摘要
Frequently quoted advantages of VCSELs over other optical sources include wafer scale fabrication and testing, low cost, ease of fabricating arrays and ease of fiber coupling. To benefit from these advantages a robust manufacturing process and product demand are needed. Avago Technologies produces a range of single channel and parallel optical link products incorporating 850nm band VCSEL sources operating at up to 10Gb/s per channel. This paper will explore some important factors which need to be controlled for manufacturability of VCSEL devices.
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关键词
VCSEL,manufacturability,process control,AlGaAs,fiber optics,laser,communications
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