Nanopatterning and Nanomachining with Table-Top Extreme Ultraviolet Lasers

Mario Marconi,Przemyslaw Wojciech Wachulak,Maria Gabriela Capeluto, Georgyi Vaschenko,Herman Bravo,Carmen S. Menoni,Jorge Rocca,Erik H. Anderson,Weilun Chao,David Attwood,Oscar Hemberg,Bradley Frazer,Scott Bloom

MRS Proceedings（2007）

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摘要

Nanopatterning and nanomachining of PMMA coated wafers was performed using table top extreme ultraviolet lasers. Features below 100 nm were imprinted with short (50-60 s) exposure times.

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nanoscale

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