Modification of Stresses in Evaporated Hafnia Coatings for Use in Vacuum
Optical Interference Coatings (2010), paper WD6(2010)
摘要
Tensile stresses in hafnia/silica coatings used in vacuum are modified by changes in process variables and design. Stress aging is extended through the use of thin-layer designs, but long-term improvements in stress are not realized.
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