Rapid Prototyping of Polymer Micro-Opto-Mechanical Components with Deep Proton Writing

Jurgen Van Erps,Christof Debaes,Michael Vervaeke,Bart Volckaerts,Heidi Ottevaere,Pedro Vynck,Virginia Gomez,Lieven Desmet,Sara Van Overmeire,Alex Hermanne,Hugo Thienpont

Frontiers in Optics (2006), paper OFWA6（2006）

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摘要

We present Deep Proton Writing as a flexible rapid prototyping technology for the fabrication of a wide variety of three dimensional refractive micro-optical components and high-aspect-ratio micro-mechanical structures with applications in telecom, datacom and biophotonics.

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