Computer Simulation of the Origination Porosity

The origination of porosity can be imagined as a nonequilibrium heterogeneous phase transition of the first kind in a solid body. The example of the silicon amorphization using processing of substrate by inert gases is presented. The influence of porosity on changes of the elastic stresses in material due to the arising of bubbles consisting of gas and vacancies in the crystal lattice of bilayer Mo/Si has been shown. Models are analyzed by means computer experiment. The structures of defects in the shape of layers and cracks had been formed due to indirect elastic interaction between clusters and their interaction with boundaries of Mo/Si layers.