Micromachining Of Polydimethylsiloxane Using Euv Light

Shintaro Fukami,Shuichi Torii,Tetsuya Makimura,Kota Okazaki,Daisuke Nakamura,Akihiko Takahashi,Tatsuo Okada,Hiroyuki Niino,Koichi Murakami

2013 CONFERENCE ON LASERS AND ELECTRO-OPTICS PACIFIC RIM (CLEO-PR)（2013）

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摘要

We studied the method to fabricate microstructures in PDMS sheet using laser-generated EUV light. In the high power density EUV light irradiation region, PDMS can be machined without chemical modification.

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关键词

crystal microstructure,laser beam machining,optical polymers,ultraviolet spectra,EUV light irradiation region,PDMS sheet,high power density,laser-generated EUV light,micromachining,microstructures,polydimethylsiloxane,

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