Multiple-wavelength GaInAs/GaAs vertical cavity surface emitting laser array with record wide wavelength span

In this paper, we propose a growth pressure control during MOCVD growth of VCSEL wafers on a patterned substrate to avoid the mismatch between a grain peak and resonant mode. We demonstrate a multiple wavelength GaInAs/GaAs VCSEL array emitting in a new wavelength window of 0.9-1.2 /spl mu/m, exhibiting a record wavelength span of 192 nm.