PERIODIC STRUCTURES PATTERNED ON METAL AND III-V COMPOUND SURFACES USING TWO-BEAM INTERFERENCE METHOD

We present an optical interference method as an efficient tool for high quality one- and two-dimensional periodic structure fabrication for photonic applications. Different types of two-dimensional periodic structures are prepared using a two-beam interference technique by double exposure process. also the patterning of an an layer deposited on glass and GaAs substrates is provided using the two-beam interference method. Quite homogeneous and two- dimensional structures with small periodicity were prepared into the photoresist, Au layer and GaAs substrate. the experimentally prepared structures are well in agreement with the theoretically designed ones.