Research and Development of Non-Spectroscopic MEMS-Based Sensor Arrays for Targeted Gas Detection
mag（2011）
关键词
noble gases,physical properties,electromechanics,quantum mechanics,rare gases,sensor array,mass spectrometry,raman spectroscopy,resonance,infrared,sensors,volume,gas chromatography mass spectrometry,microelectronics,proof of concept,thermal conductivity
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