Sub-100 nm scale ablation by direct focusing of an extreme ultraviolet laser
Bulletin of the American Physical Society(2007)
关键词
extreme ultraviolet,fresnel zone plate,proof of principle
AI 理解论文
溯源树
样例
生成溯源树,研究论文发展脉络
Chat Paper
正在生成论文摘要
Bulletin of the American Physical Society(2007)