Thermal energy loss mechanisms in micro- to nano-scale devices

Proceedings of SPIE, 2011.

Cited by: 9|Views3


In micro- and nano-scale resonators, a key performance metric is the quality factor (Q), which is the ratio of stored mechanical energy to the energy dissipated. In well-optimized designs, Q is limited by thermal physics and specific energy loss mechanisms including thermoelastic, Akhieser, and Landau-Rumer damping. The relative importanc...More



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