High-sensitivity z-axis vibration sensor and method of fabricating the sameSang Choon Ko,Chi Hoon Jun,Byoung Gon Yu,Chang Auck Choimag(2012)引用 27|浏览6暂无评分AI 理解论文溯源树样例生成溯源树,研究论文发展脉络Chat Paper正在生成论文摘要