Fabrication and X-Ray Testing of True Kinoform Lenses with High Efficiencies
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE(2015)
摘要
Kinoform lenses are focusing optics with a 100 % theoretical focusing efficiency. Up to date, the actual continuous 3D surface relief profiles of X-ray kinoform lenses could only be approximately fabricated. Now, we have come up with an effective ion beam lithography fabrication strategy producing first-ever imaging-quality circularly symmetric kinoform lenses which demonstrated reasonably high focusing efficiencies. Here, we will discuss the potential of the fabrication method and the utility of kinoform lenses enabled by it. Special emphases will be placed on materials development including selection and design, efficiency considerations for various energies and possible applications.
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关键词
Kinoforms,X-ray Microscopy,Focused Ion Beams,FIB,Ion Beam Lithography,IBL
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