谷歌浏览器插件
订阅小程序
在清言上使用

Fabrication and X-Ray Testing of True Kinoform Lenses with High Efficiencies

Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE(2015)

引用 7|浏览14
暂无评分
摘要
Kinoform lenses are focusing optics with a 100 % theoretical focusing efficiency. Up to date, the actual continuous 3D surface relief profiles of X-ray kinoform lenses could only be approximately fabricated. Now, we have come up with an effective ion beam lithography fabrication strategy producing first-ever imaging-quality circularly symmetric kinoform lenses which demonstrated reasonably high focusing efficiencies. Here, we will discuss the potential of the fabrication method and the utility of kinoform lenses enabled by it. Special emphases will be placed on materials development including selection and design, efficiency considerations for various energies and possible applications.
更多
查看译文
关键词
Kinoforms,X-ray Microscopy,Focused Ion Beams,FIB,Ion Beam Lithography,IBL
AI 理解论文
溯源树
样例
生成溯源树,研究论文发展脉络
Chat Paper
正在生成论文摘要