Deep ultraviolet photopumped stimulated emission from partially relaxed AlGaN multiple quantum well heterostructures grown on sapphire substrates

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B(2014)

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摘要
A low threshold optical power density of 240 kW/cm(2) is achieved for room temperature stimulated emission at 276 nm in AlGaN/AlGaN multiple quantum well (MQW) structures over AlN/sapphire templates. The heterostructures were grown by low-pressure metalorganic chemical vapor deposition whereas a pulsed ArF excimer laser (lambda(exc) = 193 nm) was used as the pumping source for photoluminescence measurements in edge configuration. The light emitted from the MQWs above threshold exhibits a minimum linewidth of 1.2 nm and is dominated by transverse electric polarization above threshold. The optical confinement factor in the active region was calculated to be about 2%. (C) 2014 American Vacuum Society.
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