Vertical interferometer workstation for testing large spherical optics

Proceedings of SPIE(2013)

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摘要
The design of an interferometer workstation for the testing of large concave and convex spherical optics is presented. The workstation handles optical components and mounts up to 425 mm in diameter with mass of up to 40 kg with 6 axes of adjustment. A unique method for the implementation of focus, roll and pitch was used allowing for extremely precise adjustment. The completed system includes transmission spheres with f-numbers from f/1.6 to f/0.82 incorporating reference surface diameters of up to 306 mm and surface accuracies of better than 63 nm PVr. The design challenges and resulting solutions are discussed. System performance results are presented.
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关键词
Interferometry,spherical optics,radius of curvature,optical metrology,large optics
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