Stitched Large Format CMOS Image Sensors for Dental X-Ray Digital Radiography

In this paper, we present a family of large format CIS’s designed for dental x-ray applications. The CIS areas vary from small 31.5mm x 20.1mm, to medium 34.1mm x 26.3mm, to large 37.1mm x 26.3mm. Pixel size is 19.5um x 19.5um. The sensor family was fabricated in a 0.18um CIS process. Stitching is used in the CIS fabrication for the medium and large size sensors. We present the CIS and detector system design that includes pixel circuitry, readout circuitry, x-ray trigger mechanism, scintillator, and the camera electronics. We also present characterization results including the detector performances under both visible light and x-ray radiation.