Spherical mirror testing by phase retrieval wavefront sensor

OPTIK(2016)

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摘要
In order to verify the estimated wavefront ability of the phase retrieval wavefront sensor (PRWS), a measured spherical mirror of experiment platform was set up with the method of PRWS. PRWS technology is based on the focal plane image information wavefront solver in the focal plane wavefront measured technology, whose principle is sampling a number of the given defocus images; get the wavefront phase information by solving the optical system wavefront with Fourier optical diffractive theory and mathematics optimization. In order to validate the veracity of PRWS, both the PRWS measurement results and ZYGO interferometer measurement results were compared; experimental results demonstrate that agreement is obtained among the errors distribution, PV value and RMS value of ZYGO interferometer, so PRWS technology can effectively estimate the aberrations of spherical mirror. (C) 2015 Elsevier GmbH. All rights reserved.
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关键词
Phase retrieval,Wavefront sensor,Spherical mirror,Zernike polynomial,Aberration
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