Comparison of Ion Balance Sensors for Static Control Systems of Air Ionizer

Two types of sensing systems for ion balance control, based on potential measurement and current measurement, were proposed and investigated. MOSFETs were used in both types of systems as key devices. The detection limits and response times of both systems were experimentally compared. The potential measurement type of system is superior in regard to the detection limit, and the current measurement type of system is superior in regard to the response time. The type of system should be appropriately chosen depending on the semiconductor manufacturing objective.