Abnormal Dopant Distribution in -Diffused Emitter of Textured Silicon Solar Cells

IEEE Electron Device Letters(2011)

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摘要
We investigated 2-D dopant distribution in a -diffused emitter formed on textured Si solar cells using transmission electron microscopy (TEM) combined with selective chemical etching. TEM and simulation results demonstrate that the convex and concave regions of a pyramid in the textured Si surface show deeper and shallower junctions, respectively. By considering a strong dependence of phosphorus (...
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关键词
Silicon,Junctions,Surface texture,Photovoltaic cells,Etching,Chemicals
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