Assessment of NBTI in Presence of Self-Heating in High- $k$ SOI FinFETs

IEEE Electron Device Letters(2012)

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摘要
We have experimentally investigated the threshold voltage shift due to negative bias temperature instability (NBTI). The NBTI stress in the absence of self-heating (SH) is performed at two different temperatures, i.e., T = 25°C and 125°C, at bias conditions: gate voltage Vgs = -2& V and drain voltage Vds = 0 V. To evaluate the effect of NBTI in the presence of SH, the stress is performed at room t...
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关键词
Negative bias temperature instability,Thermal resistance,Temperature measurement,FinFETs,Silicon on insulator technology,Reliability
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