A mems accelerometer with a single axis two proof masses for a wide detection range

This paper describes a single axis MEMS accelerometer with the wide detection range of acceleration from micro-G level to 20 G (G = 9.8 m/s(2)). We propose the MEMS accelerometer with two proof masses on a single chip of 4 x 4 mm(2) in area. One proof mass is for over micro G level sensing and the other is for below 20 G sensing. The experimental results of the fabricated device show that the Brownian noise B-N and the sensitivity S of the proof mass for over micro-G level are 0.18 mu G/qHz and 5.0 pF/G, respectively and these of it for below 20 G are 0.81 mu G/gHz and 3.7x10(-2) pF/G, respectively. It is confirmed that the proposed device could realize the wide detection range of acceleration from micro-G level to 20 G. (130)