A micromachined gas inertial sensor based on thermal expansion

Rong Zhu,Songlin Cai,Henggao Ding, Yong Jun Yang,Yan Su

Sensors and Actuators A: Physical（2014）

引用 24|浏览7

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摘要

•Thermal expansion in micro-scale is used to detect rotation and acceleration.•Expansion-based micro sensor is with a good linearity for a large-range rotation.•Sensor possesses simple structure, low cost, high shock resistance, and low coupling.

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关键词

Inertia sensor,Gyroscope,Accelerometer,Thermal expansion,Micro electromechanical system (MEMS)

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