Electromechanical Sensing Of Charge Retention On Floating Electrodes

It is demonstrated theoretically and experimentally, that charge on floating electrodes can be measured by its effect on the electromechanical response of an electrostatic actuator. Charged, electrostatically-floating electrodes can be used as a DC bias source or for memory storage. Charge on a floating electrode must be measured indirectly because any direct measurement (e. g. measuring the voltage of the floating electrode) would cause discharge.