Thermal Sensor Variation Reduction In Deep Sub 100nm Process Technologies

2010 IEEE SENSORS(2010)

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摘要
As technology scales, the impact of process variation to device and circuit performance has increased significantly. The presented statistical design approach illustrates the importance of pre-silicon circuit performance characterization under random variation stress. The measured data shows that by applying sound analog layout rules, actual variation can be reduced by 30% and that compensation techniques like chopping for amplifier offset cancellation and current source mismatch reduction are effective in lowering variation further by up to 55%. The choice between the static and dynamic application of these techniques is also discussed.
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关键词
temperature measurement,silicon,layout,process variation,resistors,encoding
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