Optimization of Reactive Ion Etching of Polycrystalline Diamond for MEMS Applications

Zongliang Cao,Michael W Varney,Dean M Aslam

Journal of Microelectromechanical Systems（2015）

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摘要

It has been found that diamond columns can be formed unintentionally in reactive ion etching (RIE) with O2 plasma even without a precoated metal layer. The experimental results indicate that the existence of these diamond columns prevents the effective removal of polycrystalline diamond (poly-C), also known as microcrystalline diamond. A three-step sequential RIE of poly-C thin film in CF4 (or CF4...

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关键词

Diamonds,Etching,Plasmas,Micromechanical devices,Silicon,Rough surfaces

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