Effect of annealing processes on the electrical properties of the atomic layer deposition Al

Quang Ho Luc, Edward Yi Chang, Hai Dang Trinh,Hong Quan Nguyen, Binh Tinh Tran,Yueh-Chin Lin

Japanese Journal of Applied Physics(2014)

引用 23|浏览7
暂无评分
AI 理解论文
溯源树
样例
生成溯源树,研究论文发展脉络
Chat Paper
正在生成论文摘要