Effect of annealing processes on the electrical properties of the atomic layer deposition Al Quang Ho Luc, Edward Yi Chang, Hai Dang Trinh,Hong Quan Nguyen, Binh Tinh Tran,Yueh-Chin LinJapanese Journal of Applied Physics(2014)引用 23|浏览7暂无评分AI 理解论文溯源树样例生成溯源树,研究论文发展脉络Chat Paper正在生成论文摘要