In situ fine tuning of bendable soft x-ray mirrors using a lateral shearing interferometer

Daniel J Merthe,Kenneth A Goldberg,Valeriy V Yashchuk,Wayne R Mckinney,Richard Celestre,Iacopo Mochi,James Macdougall,Gregory Y Morrison,Senajith Rekawa,Erik H Anderson,Brian V Smith,Edward E Domning,H A Padmore

Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment（2013）

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摘要

Broadly applicable, in situ at-wavelength metrology methods for x-ray optics are currently under development at the Advanced Light Source. We demonstrate the use of quantitative wavefront feedback from a lateral shearing interferometer for the suppression of aberrations. With the high sensitivity provided by the interferometer we were able to optimally tune the bending couples of a single elliptical mirror (NA=2.7mrad) in order to focus a beam of soft x-rays (1.24keV) to a nearly diffraction-limited beam waist size of 156(±10)nm.

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关键词

Metrology of x-ray optics,Synchrotron radiation,Shearing interferometry,Knife-edge measurement

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