Design and Dynamics Simulation of a Micromachined Inertial Switch with Polymer-Metal Composite Fixed Electrode for Flexible Contact

A novel inertial micro-switch with polymer-metal composite fixed electrode has been designed based on non-silicon surface micromachining technology. The micro-switch can sense the applied accelerations from positive z-axis. It can realize a flexible contact between the electrodes, eliminate the bouncing phenomenon and prolong the contact time. The dynamic contact simulation of the micro-switch has been implemented under the half-sine wave shock with 80g peak value, and its vertical response time is about similar to 80 mu s.