Surface Decoration of ϵ‐Fe2O3 Nanorods by CuO Via a Two‐Step CVD/Sputtering Approach**

CHEMICAL VAPOR DEPOSITION(2014)

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摘要
In this paper we report on the first example of Fe2O3/CuO composites fabricated by a two-step vapor-phase synthetic strategy. The target route is based on the CVD of Fe2O3 nanorod arrays on Si(100) at 400 degrees C starting from Fe(hfa)(2)TMEDA (hfa=1,1,1,5,5,5-hexafluoro-2,4-pentanedionate; TMEDA=N,N,N,N-tetramethylethylenediamine), followed by radio frequency (RF) copper sputtering for various process durations, and final ex-situ annealing in air. The combined use of complementary structural, morphological, and chemical analyses give evidence of the formation of pure nanocomposite systems, characterized by the presence of the sole E-Fe2O3 and CuO phases. The unique features of the adopted approach enable an efficient surface decoration of E-Fe2O3 rods by CuO nanoparticles a few nm in diameter, resulting in an intimate contact between the two oxides, and a CuO content tunable through variations of the sole sputtering time.
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关键词
E-Fe2O3,CuO,CVD,Sputtering,Nanocomposites
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