Implementation of heavy-ion elastic recoil detection analysis at JANNUS-Saclay for quantitative helium depth profiling

Thomas Loussouarn,Lindsay Beck,Patrick Trocellier,Daniel Brimbal,F Lepretre,E Bordas,S Vaubaillon,Y Serruys,H Lefaixjeuland

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms（2015）

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摘要

Quantitative depth profiling measurements of implanted light elements is an important issue for electronics and nuclear applications. Conventional elastic recoil detection analysis (ERDA) has been improved by using heavy ions as incident particles for quantitatively profiling helium in materials.

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关键词

ERDA,RBS,Helium,Iron,Diffusion

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