Si/SiGe:C and InP/GaAsSb Heterojunction Bipolar Transistors for THz Applications
Proceedings of the IEEE(2017)
摘要
This paper presents Si/SiGe:C and InP/GaAsSb HBTs which feature specific assets to address submillimeter-wave and THz applications. Process and modeling status and challenges are reviewed. The specific topics of thermal and substrate effects, reliability, and HF measurements are also discussed.
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关键词
Heterojunction bipolar transistors,Silicon germanium,HEMTs,MODFETs,BiCMOS integrated circuits,Annealing,Integrated circuit modeling
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