A Monolithically Integrated Large-Scale Optical Phased Array in Silicon-on-Insulator CMOS

A large-scale monolithic silicon nanophotonic phased array on a chip creates and dynamically steers a high-resolution optical beam in free space, enabling emerging applications in sensing, imaging, and communication. The scalable architecture leverages sub-array structure, mitigating the impact of process variation on the phased array per...More