A Flexible Capacitive Tactile Sensor for Manipulator.

A flexible capacitive tactile sensor with micro needle structure is designed in this paper for the palm and fingers of the manipulator. The sensor has better sensitivity, stability and repeatability and the spatial layout of the manipulator tactile sensor is designed in this paper. The main raw material PDMS is prepared to meet the requirements of a flexible tactile sensor. The silicon-based MEMS technology is used to achieve a tiny micro needle structure. Experimental results show that the sensor is proved to work well and able to guarantee a better sensitivity at 30 N pressure.