Nanorobotic System for Precise In Situ Three-Dimensional Manufacture of Helical Microstructures.

IEEE Robotics and Automation Letters(2018)

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摘要
The helical microstructure has been regarded as one of the essential geometrical shapes widely utilized in microelectromechanical systems (MEMS) and lab on chip systems. Different manufacture methods for helical microstructures attracted the researchers' attention due to their respective advantages. Inspired by traditional machining techniques, this letter reports a new manufacture method for accu...
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关键词
Microstructure,Scanning electron microscopy,Three-dimensional displays,Trajectory,Fabrication,Manipulators
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