Synthesis of High-Quality Large-Area Homogenous 1T' MoTe 2 from Chemical Vapor Deposition.

High-quality large-area few-layer 1T' MoTe2 films with high homogeneity are synthesized by the controlled tellurization of MoO3 film. The Mo precursor plays a key role in determining the quality and morphology of the 1T' MoTe2. Furthermore, the amount of Te strongly influences the phase of the MoTe2. The growth method paves the way toward the scalable production of 1T' MoTe2-based applications.